Nanotechnology

Week 6 - MEMS

This week we'll look into the world of MEMS, and how 'smalltech' was really the start of nanotechnology, long before we called it that. MEMS and sensors are also experiencing somewhat of a 'revival' or growth spurt, especially in automotive applications.

MEMS overview - http://www.sandia.gov/mstc/technologies/micromachines/tech-info/overview/
MEMS applications - http://www.memsnet.org/mems/applications.html
MEMS fabrication - http://www.memsnet.org/mems/fabrication.html
MEMS integration - article on MEMS industry integrated applications
MEMS development - http://www.future-fab.com/documents.asp?d_ID=1227
MEMSnet - http://www.memsnet.org/mems/
MEMS and Nanotechnology Exchange - http://www.mems-exchange.org/

Learning outcomes for this week:

What are MEMS?
- MEMS
- NEMS
- BioMEMS
Name some MEMS appalications
Describe how MEMS are fabricated
What is MEMS inetgration? (MEMS and IT)
Describe future MEMS develeopment
- NEMS
- BioMEMS
- MEMS / IT integration