Materials characterization in the MEMS and sensors industry focuses on analyzing , especially for characterizing the lithography and line integrity, failure and defect analysis of finished MEMS and sensors, and advanced materials development for creating mew materials nanostructures for MEMS, BioMEMS, and sensors. Reliable and low cost MEMS in military, aerospace, and automotive applications require sophisticated tools in all aspects from materials and process development, to problem solving, and failure analysis. Our examples will focus on AFM and SEM analysis of lithography, failure analysis of finished MEMS devices, and QA/QC of MEMS in integrated electronic circuitry and networks. We will also look at some of the challenges in developing new and biocompatible materials for BioMEMS and sensors, including contamination control in clean room manufacturing environments.
Problem 1 - AFM and SEM image analysis of MEMS
Problem 2 - Failure analysis of finished MEMS and sensors
Problem 3 - Materials characterization to support materials and process development of BioMEMS and sensors
Copyright © 2006 - 2007 Robert D. Cormia - January 1, 2007